USE OF THIN SI CRYSTALS IN BACKSCATTERING-CHANNELING STUDIES OF SI-SIO2 INTERFACE

被引:90
作者
FELDMAN, LC
SILVERMAN, PJ
WILLIAMS, JS
JACKMAN, TE
STENSGAARD, I
机构
[1] UNIV GUELPH,GUELPH N1G 2W1,ONTARIO,CANADA
[2] RUTGERS STATE UNIV,NEW BRUNSWICK,NJ 08903
关键词
D O I
10.1103/PhysRevLett.41.1396
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:1396 / 1399
页数:4
相关论文
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FELDMAN LC, P INT C PHYSICS SIO2
[2]   LATTICE LOCATION BY CHANNELING ANGULAR-DISTRIBUTIONS - BI IMPLANTED IN SI [J].
PICRAUX, ST ;
GIBSON, WM ;
BROWN, WL .
PHYSICAL REVIEW B, 1972, 6 (04) :1382-&
[3]  
STENSGAARD I, UNPUBLISHED