PROPERTIES OF ION-PLATED NB2O5 FILMS

被引：13

作者：

EDLINGER, J

RAMM, J

PULKER, HK

机构：

[1] Balzers AG Zentrallabor, Liechtenstein

来源：

THIN SOLID FILMS | 1989年 / 175卷 / 1 -2 pt 2期

关键词：

Chemical Analysis - Films--Mechanical Properties;

D O I：

10.1016/0040-6090(89)90829-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Single films of Nb2O5 have been deposited on various substrates by reactive low voltage ion plating in a Balzers BAP 800 ion plating system. Chemical composition, structure, and optical and mechanical properties have been investigated. Nb2O5 offers promise as a high index optical film material in the wavelength range from 380 nm to 9 μm.

引用

页码：207 / 212

页数：6

共 7 条

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[2]

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[3]

PAWLEWICZ WT, 1979, PNLSA8012 PAC NW LAB

[4]

PULKER HK, 1987, 1987 P INT S TRENDS, V2, P741

[5]

PULKER HK, 1986, Patent No. 4619748

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SWANEPOEL, R .

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MEYER, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :92-97

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