ELECTROMIGRATION DAMAGE IN ALUMINUM FILM CONDUCTORS

被引：218

作者：

ATTARDO, MJ

ROSENBERG, R

机构：

来源：

关键词：

D O I：

10.1063/1.1659233

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2381 / +

页数：1

共 16 条

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