SIMULTANEOUS AUGER SURFACE SPECTROSCOPY STUDY OF SPUTTERED A-SI, A-SI-H AND MONO-CRYSTALLINE SI (111) WITH AND WITHOUT H CHEMISORPTION

被引:14
作者
ALLIE, G
LAUROZ, C
CHENEVASPAULE, A
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D O I
10.1016/0022-3093(80)90605-5
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:267 / 272
页数:6
相关论文
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