ZNO-THIN FILM CHEMICAL SENSORS

被引：96

作者：

MULLER, J

WEISSENRIEDER, S

机构：

[1] Department of Semiconductor Technology, Technical University Hamburg-Harburg, Hamburg, D-21073

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1994年 / 349卷 / 05期

关键词：

D O I：

10.1007/BF00326603

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The properties of reactively sputtered ZnO thin films used as chemical sensors are investigated in N2, synthetic air, 10 ppm of NO2, 30 ppm of CO and in the presence of humidity. The behaviour is correlated to a grain boundary determined conduction model. Using the resistance ratio of twin sensors, one of which is coated with a thin Au catalytic layer, allows the sensor response to CO to be increased and the output signal to be stabilized against sensor drift; the response time is also reduced.

引用

页码：380 / 384

页数：5