The kinetics of photoinduced surface deposition (PSD) of metallic silver have been studied through observation of growth of the photodeposited Ag particles. The amount of metallic Ag segregated by PSD increases in proportion to exposure time at the early stage and subsequently to the square root of exposure time. The kinetics can be explained by the change in the rate-determining step from the photoelectronic process to diffusion process of Ag+ ions in glass.