A CLUSTER-MODIFIED POISSON MODEL FOR ESTIMATING DEFECT DENSITY AND YIELD

被引：18

作者：

FERRISPRABHU, AV

机构：

[1] IBM General Technology Division, Essex Junction

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1990年 / 3卷 / 02期

关键词：

D O I：

10.1109/66.53187

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple modification of the Poisson model is described that accounts for defect clustering when estimating the defect density and yield of future product, in a manner that preserves the simplicity and computational convenience of the Poisson model, and provides more realistic estimates than does the unmodified Poisson model. © 1990 IEEE

引用

页码：54 / 59

页数：6

共 17 条

[1]

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[2]

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[3]

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[4]

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[5]

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[6]

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[7]

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[8]

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[9]

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[10]

Ferris-Prabhu A.V., Fault probability and critical area in VLSI yield projection, (1982)

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