NARROW YBCO MICROBRIDGES IN ULTRATHIN LASER DEPOSITED FILMS

被引：4

作者：

DANERUD, M ^{[1
]}

GERSHENSON, ME ^{[1
]}

IVANOV, Z ^{[1
]}

WINKLER, D ^{[1
]}

CLAESON, T ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,INST RADIOENGN & ELECTR,MOSCOW,RUSSIA

来源：

PHYSICA C | 1991年 / 185卷

关键词：

D O I：

10.1016/0921-4534(91)91094-K

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 angstrom thick YBCO film on LaAlO3 was covered by 200 angstrom of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 angstrom thick ZrO2 etch mask. The microbridges (down to 0.4-mu-m wide) were produced by ion milling. The 1-mu-m wide microbridge showed T(c) above 90 K and jc above 10(6) A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.

引用

页码：1939 / 1940

页数：2