REFRACTORY-METAL NITRIDE ENCAPSULATION FOR COPPER WIRING

被引：23

作者：

LI, J ^{[1
]}

MAYER, JW ^{[1
]}

机构：

[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85287

来源：

MRS BULLETIN | 1993年 / 18卷 / 06期

关键词：

D O I：

10.1557/S0883769400047333

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：52 / 56

页数：5

共 30 条

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[14]

Li J., 1993, Advanced Metallization for ULSI Applications 1992. Proceedings of the Conference, P75

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APPLIED PHYSICS LETTERS, 1992, 60 (24) :2983-2985

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