DEVELOPMENT OF AN ULTRAHIGH-VACUUM, INVACUO WAFER TRANSFER FACILITY INTEGRATED PROCESSING

被引：7

作者：

RUDDER, RA

HENDRY, RC

MARKUNAS, RJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575844

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：802 / 807

页数：6

共 5 条

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HOH, PD .

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[3] LUBRICATING OF MECHANISMS FOR VACUUM SERVICE [J].

ROLLER, KG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1161-1165

[4]

TOLLIVER DL, 1985, 3RD P INT S VER LARG, V85, P3

[5]

1988, 35TH WORKSH CONT VAC