SPUTTERING YIELD OF GERMANIUM IN RARE GASES

被引：25

作者：

LAEGREID, N

WEHNER, G

MECKEL, B

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1959年 / 30卷 / 03期

关键词：

D O I：

10.1063/1.1735171

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：374 / 377

页数：4

共 12 条

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