DETERMINATION OF EVAPORATION RATE AND VAPOR-PRESSURE OF ORGANIC MONOMERS USED FOR VAPOR-DEPOSITION POLYMERIZATION

被引:28
作者
TAKAHASHI, Y [1 ]
MATSUZAKI, K [1 ]
IIJIMA, M [1 ]
FUKADA, E [1 ]
TSUKAHARA, S [1 ]
MURAKAMI, Y [1 ]
MAESONO, A [1 ]
机构
[1] SINKU RIKO INC,MIDORI KU,YOKOHAMA 226,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1993年 / 32卷 / 6B期
关键词
EVAPORATION RATE; SATURATED VAPOR PRESSURE; STEARIC ACID; THERMOGRAVIMETRY; VAPOR DEPOSITION POLYMERIZATION; MONOMER;
D O I
10.1143/JJAP.32.L875
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thermogravimetry (TG) and the Langmuir equation have been employed for the determination of the temperature dependence of the evaporation rate and saturated pressure of monomers used in vapor deposition polymerization (VDP). The measuring process utilizes the evaporation of monomers in vacuum. The ranges of the evaporation rate and saturated pressure of monomers as determined by the TG technique are from 10(-2) to 10(-5) mol/M2.s and from 1 to 10(-3) Pa, respectively. Comparison of the evaporation rate vs temperature relation and the melting point of monomers determines whether the evaporation involves sublimation from a solid surface or evaporation from a liquid surface.
引用
收藏
页码:L875 / L878
页数:4
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