Real-time compositional analysis of submicrometre particles

被引：11

作者：

Reents, W. D., Jr. ^{[1
]}

Downey, S. W. ^{[1
]}

Emerson, A. B. ^{[1
]}

Mujsce, A. M. ^{[1
]}

Muller, A. J. ^{[1
]}

Siconolfi, D. J. ^{[1
]}

Sinclair, J. D. ^{[1
]}

Swanson, A. G. ^{[1
]}

机构：

[1] AT&T Bell Labs, Murray Hill, NJ 07974 USA

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1994年 / 3卷 / 03期

关键词：

D O I：

10.1088/0963-0252/3/3/020

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A particle analyser is described that simultaneously detects and characterizes < 0.02 to > 10 mu m diameter particles independent of particle composition in real time. No previous instrument has been able to perform these functions simultaneously. Our design uses pulsed laser ablation of particles followed by time-of-flight mass spectrometric analysis of the resulting ions. The ion intensity is related to particle size at least for small particles. Thus particle size information is obtained concurrently with the other information.

引用

页码：369 / 372

页数：4

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