LOW-PRESSURE RF PLASMA REACTIONS IN LIGHT-HYDROCARBONS - METHANE

被引：11

作者：

CANEPA, P

CASTELLO, G

MUNARI, S

NICCHIA, M

机构：

来源：

RADIATION PHYSICS AND CHEMISTRY | 1980年 / 15卷 / 2-3期

关键词：

D O I：

10.1016/0146-5724(80)90171-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：485 / 495

页数：11

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