KINETICS OF THIN-FILM GROWTH UNDER HIGH ADATOM CONCENTRATIONS

被引:6
作者
ALEKSANDROV, LN [1 ]
ENTIN, IA [1 ]
机构
[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1977年 / 39卷 / 01期
关键词
D O I
10.1002/pssa.2210390138
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:327 / 330
页数:4
相关论文
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