1ST STAGES STUDY OF HIGH-ENERGY ION-BEAM-ASSISTED DEPOSITION

被引：12

作者：

ARNAULT, JC

DELAFOND, J

TEMPLIER, C

CHAUMONT, J

ENEA, O

机构：

[1] CTR SPECT NUCL & SPECTROMETRIE MASSE,F-91405 ORSAY,FRANCE

[2] UFR SCI,CATALYSE CHIM ORGAN LAB,URA 350,F-86022 POITIERS,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷

关键词：

D O I：

10.1016/0168-583X(93)90804-F

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The first stages of growth of gold layers obtained by high energy IBAD have been investigated. Morphological parameters have been calculated from TEM micrographs with the use of image processing. For low Au deposit, assisted deposition leads to a lowering of the cluster density while an opposite result is obtained for higher Au deposit, resulting from an increase of the small clusters part in the double peak size distribution. It is interpreted as the result of a competition between enhanced diffusion and ballistic dissolution effects.

引用

页码：1384 / 1387

页数：4

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