RANGE DISTRIBUTION THEORY BASED ON ENERGY-DISTRIBUTION OF IMPLANTED IONS

[1] INFLUENCE OF ANISOTROPIC SCATTERING ON STOPPING BY ELASTIC COLLISIONS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) : 3565 - &

[2] BOWER RW, 1968, IEEE T, VED15, P757

[3] FURUKAWA S, 1971, JPN J APPL PHYS S, V40, P3

[4] ION IMPLANTATION IN SEMICONDUCTORS .I. RANGE DISTRIBUTION THEORY AND EXPERIMENTS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1968, 56 (03): : 295 - +

[5] JOHNSON WS, 1969, PROJECTED RANGE STAT

[6] Lindhard J., 1963, KGL DANSKE VIDENSKAB, V33

[7] NAMBA S, PRIVATE COMMUNICATIO

[8] NELSON RS, 1968, OBSERVATION ATOMIC C, P3

[9] NELSON RS, 1968, OBSERVATION ATOMIC C, P16

[10] RANGES OF PROJECTILES IN AMORPHOUS MATERIALS [J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) : 455 - &

[1] INFLUENCE OF ANISOTROPIC SCATTERING ON STOPPING BY ELASTIC COLLISIONS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) : 3565 - &

[2] BOWER RW, 1968, IEEE T, VED15, P757

[3] FURUKAWA S, 1971, JPN J APPL PHYS S, V40, P3

[4] ION IMPLANTATION IN SEMICONDUCTORS .I. RANGE DISTRIBUTION THEORY AND EXPERIMENTS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1968, 56 (03): : 295 - +

[5] JOHNSON WS, 1969, PROJECTED RANGE STAT

[6] Lindhard J., 1963, KGL DANSKE VIDENSKAB, V33

[7] NAMBA S, PRIVATE COMMUNICATIO

[8] NELSON RS, 1968, OBSERVATION ATOMIC C, P3

[9] NELSON RS, 1968, OBSERVATION ATOMIC C, P16

[10] RANGES OF PROJECTILES IN AMORPHOUS MATERIALS [J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) : 455 - &