EFFECT OF ANNEALING ON SPUTTERED GDIG FILMS

被引:7
作者
JOSEPHS, RM
机构
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D O I
10.1109/TMAG.1970.1066879
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:553 / +
页数:1
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