PREPARATION OF CO-C FILMS BY RADIOFREQUENCY SPUTTERING

被引:12
作者
ODA, K [1 ]
YOSHIO, T [1 ]
ODA, K [1 ]
机构
[1] YONAGO NATL COLL TECHNOL,DEPT IND CHEM,YONAGO 683,JAPAN
关键词
D O I
10.1007/BF00726532
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:1319 / 1321
页数:3
相关论文
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