ION-BEAM-INDUCED AMORPHIZATION OF SILICON SURFACES - ROLE ON THE FORMATION OF AU/SI(100) INTERFACES

被引:9
作者
CARRIERE, B
DEVILLE, JP
ELMAACHI, A
机构
关键词
D O I
10.1016/0039-6028(86)90845-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:149 / 157
页数:9
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