INVESTIGATION OF TI-PT DIFFUSION BARRIER FOR GOLD BEAM LEADS ON ALUMINUM

[1] BOWER RW, 1973, APPL PHYS LETT, V23, P99, DOI 10.1063/1.1654823

[2] DIFFUSION KINETICS OF AU THROUGH PT FILMS ABOUT 2000 AND 6000A THICK STUDIED WITH AUGER-SPECTROSCOPY [J]. THIN SOLID FILMS, 1976, 31 (03) : 265 - 273

[3] THIN-FILM INTERDIFFUSION .2. TI-RH, TI-PT, TI-RH-AU, AND TI-AU-RH [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4284 - 4290

[4] ENGLISH AT, 1972, J ELECTRON MATER, V1, P1

[5] HERB GK, 1878, Patent No. 209560

[6] HERB GK, 1973, Patent No. 2261337

[7] KOLESNIK DP, 1972, PHYS MET, V3, P76

[8] LEHNERT G, 1971, DEW TECH BER, V11, P236

[9] MELLIARSMITH CM, UNPUBLISHED

[10] THIN-FILM INTERACTION IN ALUMINUM AND PLATINUM [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5175 - 5181

[1] BOWER RW, 1973, APPL PHYS LETT, V23, P99, DOI 10.1063/1.1654823

[2] DIFFUSION KINETICS OF AU THROUGH PT FILMS ABOUT 2000 AND 6000A THICK STUDIED WITH AUGER-SPECTROSCOPY [J]. THIN SOLID FILMS, 1976, 31 (03) : 265 - 273

[3] THIN-FILM INTERDIFFUSION .2. TI-RH, TI-PT, TI-RH-AU, AND TI-AU-RH [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4284 - 4290

[4] ENGLISH AT, 1972, J ELECTRON MATER, V1, P1

[5] HERB GK, 1878, Patent No. 209560

[6] HERB GK, 1973, Patent No. 2261337

[7] KOLESNIK DP, 1972, PHYS MET, V3, P76

[8] LEHNERT G, 1971, DEW TECH BER, V11, P236

[9] MELLIARSMITH CM, UNPUBLISHED

[10] THIN-FILM INTERACTION IN ALUMINUM AND PLATINUM [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5175 - 5181