INSPECTION OF SURFACE FLAWS BY COMPARATOR MICROSCOPY

被引：22

作者：

BAKER, LR

机构：

来源：

APPLIED OPTICS | 1988年 / 27卷 / 22期

关键词：

D O I：

10.1364/AO.27.004620

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4620 / 4625

页数：6

共 18 条

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BAKER, LR .

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[2]

BAKER LR, 1985, P SOC PHOTO-OPT INST, V525, P64

[3]

BAKER LR, 1987, P SOC PHOTOOPT INSTR, V830, P23

[4]

BENNETT JM, 1979, P SOC PHOTOOPTICAL I, V181, P124

[5]

Cormier A. J., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V805, P152

GUENTHER, KH ;

WIERER, PG ;

BENNETT, JM .

APPLIED OPTICS, 1984, 23 (21) :3820-3836

[7]

HUARD A, 1985, P SOC PHOTO-OPT INST, V525, P36

[8] SIMULATING THE SCRATCH STANDARDS FOR OPTICAL-SURFACES - THEORY [J].

JOHNSON, EG .

APPLIED OPTICS, 1983, 22 (24) :4056-4068

MARTIN, S .

OPTICA ACTA, 1978, 25 (12) :1113-1135

[10] THEORY OF OPTICAL EDGE-DETECTION AND IMAGING OF THICK LAYERS [J].

NYYSSONEN, D .