SCANNING TUNNELING MICROSCOPY OF ION IMPACTS ON SEMICONDUCTOR SURFACES

被引:39
作者
WILSON, IH
ZHENG, NJ
KNIPPING, U
TSONG, IST
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.576155
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:2840 / 2844
页数:5
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