NANOCHANNEL ARRAY GLASS

被引：313

作者：

TONUCCI, RJ ^{[1
]}

JUSTUS, BL ^{[1
]}

CAMPILLO, AJ ^{[1
]}

FORD, CE ^{[1
]}

机构：

[1] VARO INC,NI TEC DIV,GARLAND,TX 75041

来源：

SCIENCE | 1992年 / 258卷 / 5083期

关键词：

D O I：

10.1126/science.258.5083.783

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 10(10) channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.

引用

页码：783 / 785

页数：3

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