LOW-LOSS OPTICAL CHANNEL WAVE-GUIDES IN KNBO3 BY MULTIPLE ENERGY ION-IMPLANTATION

被引：25

作者：

FLUCK, D ^{[1
]}

GUNTER, P ^{[1
]}

FLEUSTER, M ^{[1
]}

BUCHAL, C ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, ISI FORSCHUNGSZENTRUM, W-5170 JULICH 1, GERMANY

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 05期

关键词：

D O I：

10.1063/1.351689

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Permanent optical channel waveguides in single crystals of KNbO3 are formed with low-dose MeV He ion irradiation, A single energy implantation forms a confinement barrier at the projected range of the ions whereas multiple energy implantations combined with a positive shielding mask form the side walls. Guiding modes are produced and propagation losses as low as 1.0 dB/cm are measured without the need for any annealing. The irradiation induced refractive index changes that define the boundaries of the waveguiding channels are made visible with cross-polarized light microscopy.

引用

页码：1671 / 1675

页数：5

共 20 条

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