CHARACTERIZATION OF THE BIAS NUCLEATION PROCESS

被引:29
作者
KULISCH, W
SOBISCH, B
KUHR, M
BECKMANN, R
机构
[1] Institute of Technical Physics, University of Kassel, 34 109 Kassel
关键词
DIAMOND; DIAMOND NUCLEATION; DC BIAS MEASUREMENT; INFRARED ABSORPTION;
D O I
10.1016/0925-9635(94)05235-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The bias-enhanced nucleation of diamond was investigated as a function of time by Fourier transform IR, Auger electron spectroscopy and stress measurements. In addition, the process was characterized by optical emission spectroscopy, but no drastic changes in gas phase composition could be detected. Concerning the composition of the deposits, the following sequence of events was established: formation of an SiC layer, formation of a hydrocarbon layer, development of stress and simultaneous formation of diamond nuclei. Additional experiments showed that the nucleation process relies on both the bias voltage and the substrate temperature. The results are discussed in terms of recently published models for bias-enhanced nucleation.
引用
收藏
页码:401 / 405
页数:5
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