IMPROVEMENT OF SCANNING ACCURACY OF PZT PIEZOELECTRIC ACTUATORS BY FEEDFORWARD MODEL-REFERENCE CONTROL

被引：82

作者：

JUNG, SB ^{[1
]}

KIM, SW ^{[1
]}

机构：

[1] KOREA ADV INST SCI & TECHNOL,DEPT PRECIS ENGN & MECHATRON,373-1 KUSUNG DONG,TAEJON 305701,SOUTH KOREA

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1994年 / 16卷 / 01期

关键词：

PZT CERAMICS; PIEZOELECTRIC ACTUATORS; HYSTERESIS EFFECTS; HYSTERESIS SUPPRESSION; FEEDFORWARD CONTROL; SCANNING MICROSCOPY;

D O I：

10.1016/0141-6359(94)90018-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

For ultraprecision, three-dimensional surface metrology such as atomic force microscopy, PZT ceramic actuators are popularly used to scan a testpiece in the lateral directions while its vertical dimension is traced by a measuring probe. In this type of scanning microscopy, the measuring accuracy in lateral dimensions is critically limited by hysteresis errors in PZT ceramics when operated by simple open-loop control. We describe a feed-forward control method to effectively reduce scanning errors by using deterministic hysteresis path models. Experimental results prove that this method can enhance scanning accuracy by an order of 10 as compared with conventional open-loop scanning.

引用

页码：49 / 55

页数：7

共 21 条

[1]

IEEE Standard on Piezoelectricity, IEEE Standard, (1978)

[2]

Mills, Hurst, A piezoceramic fine movement control, J Phys E Sci Instrum, 14, pp. 295-296, (1981)

[3]

Scire, Teague, Piezo-driven 50-μm range stage with subnanometer resolution, Rev Sci Instrum, 49, pp. 1735-1740, (1978)

[4]

Hipps, Glenn, Dale, A scanning tunneling microscope with a wide sampling range, Review of Scientific Instruments, 49, pp. 1735-1740, (1978)

[5]

Binnig, Roher, Scanning tunneling microscopy, IBM J Rev Develop, 30, pp. 355-369, (1986)

[6]

Courjon, Sarateddine, Soaher, Scanning tunneling optical microscopy, Opt Commun, 71, pp. 23-28, (1989)

[7]

Reddick, Waramack, Ferrell, New form of scanning optical microscopy, Phys Rev B, 39, pp. 767-770, (1989)

[8]

Bryant, Miller, Yang, Scanning tunneling and atomic force microscopy combined, Appl Phys Lett, 52, pp. 2233-2235, (1988)

[9]

Meyer, Amev, Novel optical approach to atomic force microscopy, Appl Phys Lett, 53, pp. 1045-1047, (1988)

[10]

Binnig, Quate, Atomic force microscopy, Phys Rev Lett, 56, pp. 930-933, (1986)

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