ELASTIC RECOIL DETECTION FOR MEDIUM-ENERGY ION-SCATTERING

被引:26
作者
COPEL, M
TROMP, RM
机构
[1] IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
关键词
D O I
10.1063/1.1144322
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Medium-energy ion scattering (MEIS) has been successfully applied for many years as a technique for structural analysis of solids. Advantages over competing techniques include superb depth resolution (5-10 angstrom), quantitative information (well-known cross sections), and ease of interpretation. A weakness of the technique is the lack of sensitivity to light elements. We have adapted the technique to detect light elements by elastic recoil detection analysis (ERDA). This has been used to analyze samples containing hydrogen and boron, with depth resolution of almost-equal-to 10 angstrom, comparable to conventional MEIS. This is an order of magnitude improvement over conventional ERDA.
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页码:3147 / 3152
页数:6
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