ELECTROSTATIC PROBE DETERMINATION OF ELECTRON DENSITY IN MEDIUM PRESSURE (0.2-28 TORR) DISCHARGE PLASMA OF ARGON

被引：16

作者：

CHEN, SL

CHANG, JS

MATSUMUR.S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1970年 / 41卷 / 04期

关键词：

D O I：

10.1063/1.1659096

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1711 / &

共 19 条

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