THE THEORY AND PRACTICE OF VACUUM SCIENCE-TECHNOLOGY IN SCHOOLS AND COLLEGES - MODERN DIFFUSION PUMP VS TURBOMOLECULAR PUMP SYSTEMS

被引：4

作者：

HARRIS, NS

机构：

来源：

关键词：

D O I：

10.1016/S0042-207X(80)80680-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：175 / 181

页数：7

共 26 条

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