SCANNING ELECTRON-DIFFRACTION STUDY OF VAPOR-DEPOSITED AND ION-IMPLANTED THIN-FILMS OF GE (II)

被引:27
作者
GRACZYK, JF [1 ]
CHAUDHAR.P [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1973年 / 58卷 / 02期
关键词
D O I
10.1002/pssb.2220580209
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:501 / 510
页数:10
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