RADIOFREQUENCY ELECTRON SWARM TRANSPORT IN REACTIVE GASES AND PLASMAS

被引：30

作者：

MAEDA, K

MAKABE, T

机构：

[1] Department of Electrical Engineering, Keio University, Yokohama, 223

来源：

PHYSICA SCRIPTA | 1994年 / T53卷

关键词：

D O I：

10.1088/0031-8949/1994/T53/006

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper gives a historical review of the development of radiofrequency (RF) electron swarm from a theoretical point of view. Also the recent progress of the direct numerical procedure (DNP) for solving the Boltzmann equation will be discussed with some typical examples of the temporally modulated velocity distribution in Ar and HCl in an RF field. The significance of DNP will be demonstrated for an RF swarm in the frequency range from MHz to GHz at strong fields.

引用

页码：61 / 69

页数：9

共 16 条

[1]

BROWN SC, 1956, HDB PHYSIK, V21, P383

[2]

CROMPTON RW, 1991, GASEOUS ELECTRONICS

[3] A NOVEL ALGORITHM FOR CALCULATING THE TIME EVOLUTION OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN GASEOUS DISCHARGES [J].