EFFECT OF HYDROGEN GLOW-DISCHARGE CONDITIONING ON ZR-AL GETTER PUMPS

被引:13
作者
DYLLA, HF
CECCHI, JL
ULRICKSON, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词
D O I
10.1116/1.570850
中图分类号
O59 [应用物理学];
学科分类号
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页码:1111 / 1113
页数:3
相关论文
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