ANALYSIS OF THIN-FILMS BY SSMS - MORE DETAILED DISCHARGE MODEL AND RECENT EXPERIMENTS

被引:22
作者
DERZHIEV, VI [1 ]
RAMENDIK, GI [1 ]
LIEBICH, V [1 ]
MAI, H [1 ]
机构
[1] AKAD WISSENSCH DDR, ZENT FESTKORPERPHYS & WERKSTOFFORSCH, DRESDEN, GERMANY
关键词
D O I
10.1016/0020-7381(80)80018-0
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
引用
收藏
页码:345 / 361
页数:17
相关论文
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