LASEM - A NOVEL COMBINED DEVICE FOR LASER MODIFICATION IN SEM

被引：12

作者：

WETZIG, K

EDELMANN, J

FISCHER, W

MUELLER, H

机构：

来源：

关键词：

D O I：

10.1002/sca.4950090303

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：99 / 107

页数：9

共 10 条

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[2]

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[3]

EDELMANN J, 1985, 5TH INT C LAS APPL D

[4]

HERRENDORFER G, 1969, Patent No. 65324

[5] LASER HEAT-TREATMENT - THE STATE OF THE ART [J].

MAZUMDER, J .

JOURNAL OF METALS, 1983, 35 (05) :18-26

[6]

NOWICKI M, 1982, LASER ELEKTRONIKTECH, P39

[7]

ROEBUCK B, 1985, 11TH P PLANS SEM REU, P1

[8]

SCHEIBE HJ, 1985, 5TH INT C LAS APPL D

[9]

WETZIG K, 1985, Patent No. 238207

[10]

WETZIG K, 1986, 11TH P INT C EL MICR, V1, P333