NEW MESH TYPE SILICON PHOTODIODE AND ITS PERFORMANCE

被引:2
作者
KASHIWAGI, T
DOKE, T
KIKUCHI, J
ISHIDA, N
ONABE, H
OBINATA, M
机构
[1] SEIKEI UNIV,DEPT ENGN,MUSASHINO,TOKYO 180,JAPAN
[2] RAYTECH CORP,UTSUNOMIYA,TOCHIGI 32103,JAPAN
[3] TOHNIC CO LTD,CHIGASAKI,KANAGAWA 253,JAPAN
关键词
D O I
10.1016/0168-9002(93)91431-L
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A large area silicon photodiode (approximately 11 cm2) for the detection of ultraviolet photons has been fabricated by a photo engraving process (PEP). A quantum efficiency of 110% was achieved for the scintillation light (175 nm) in liquid xenon excited by 5.486 MeV alpha-particles from Am-241.
引用
收藏
页码:148 / 151
页数:4
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