Oxidation behaviour of W-N-M (M = Ni, Ti) sputtered films

被引:19
作者
Louro, C. [1 ]
Cavaleiro, A. [1 ]
机构
[1] Univ Coimbra, Dept Mech Engn, P-3000 Coimbra, Portugal
关键词
oxidation; sputtering; coatings; tungsten-nitride; tungsten-oxide;
D O I
10.1016/0257-8972(95)08318-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this research work we studied the influence of metal (Ni or Ti) addition on the oxidation behaviour of W-N coatings at different temperatures. For this purpose steel substrates were coated by reactive (N(2)) sputtering composite W-10 wt.%Ti or Ni targets. The highest oxidation resistance was found for W-N-Ni, followed by W-N-Ti and finally by W-N. This behaviour is explained as a function of the as-deposited structure and morphologies of the coatings and of the compactness and type of the oxide formed. W-N-Ni films give rise to denser oxide scales than W-N films and to different types of oxide in comparison with W-N-Ti films. This behaviour is verified only up to 750 degrees C. Afterwards, the oxidation behaviour of W-N-Ni coatings is similar to the other films. This temperature corresponds to the crystallization onset of the as-deposited amorphous structure of W-N-Ni.
引用
收藏
页码:998 / 1004
页数:7
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