ABSORBING LAYERS FOR THERMAL INFRARED DETECTORS

被引：65

作者：

LANG, W

KUHL, K

SANDMAIER, H

机构：

[1] Fraunhoferinstitut für Festkörpertechnologie, 8000 Munich 60

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 34卷 / 03期

关键词：

D O I：

10.1016/0924-4247(92)85007-O

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Infrared absorbing layers are used to transform radiation into heat. They must combine high absorption with low film thickness. Three methods for their deposition have been investigated: thin metallic films; platinum black deposited by a galvanic process; highly porous metals deposited by evaporation in nitrogen.

引用

页码：243 / 248

页数：6