ULTRAHIGH-BRIGHTNESS, FEMTOSECOND ARF EXCIMER LASER SYSTEM

被引：14

作者：

MOSSAVI, K ^{[1
]}

HOFMANN, T ^{[1
]}

TITTEL, FK ^{[1
]}

SZABO, G ^{[1
]}

机构：

[1] JATE UNIV,DEPT OPT & QUANTUM ELECTR,H-6720 SZEGED,HUNGARY

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 11期

关键词：

D O I：

10.1063/1.108734

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An ultrahigh-brightness ArF excimer laser system is described that is capable of generating pulse energies of 60 mJ with a pulse duration of approximately 700 fs. The system utilizes a newly developed seed pulse generation scheme based on spectrally compensated sum-frequency mixing in beta-barium metaborate (BBO), and a double-pass discharge pumped ArF excimer preamplifier followed by an electron beam pumped power amplifier.

引用

页码：1203 / 1205

页数：3

共 21 条

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