DEGENERATE CADMIUM-OXIDE FILMS FOR ELECTRONIC DEVICES

被引：126

作者：

CHU, TL

CHU, SS

机构：

[1] Department of Electrical Engineering, University of South Florida, Tampa, 33620, Florida

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1990年 / 19卷 / 09期

关键词：

Cadmium oxide; electrical resistivity; ion beam sputtering; optical transmission; semiconductor film; spray pyrolysis;

D O I：

10.1007/BF02652928

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Highly conducting and transparent cadmium oxide films have been deposited on Corning 7059 glass substrates by ion-beam sputtering and by spray pyrolysis. The electrical and optical properties of CdO films prepared by the two techniques are similar. Typical films of 0.5 μm thickness have electrical resistivities of (2-5) × 10-3 ohm-cm, carrier concentrations of approximately 1020 cm-3, and an optical transmission of higher than 70% in the wavelength range of 600-900 nm. An optical bandgap of 2.4-2.42 eV was deduced from the optical transmission data. © 1990 AIME.

引用

页码：1003 / 1005

页数：3

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