CATHODIC ARC EVAPORATION OF GRAPHITE WITH CONTROLLED CATHODE SPOT POSITION

A novel modification of the d.c. cathodic arc evaporation process for graphite is described which includes a method for controlling the arc spot position. For that purpose the electric potential of a cathode shield undergoes computer-aided analysis. The results are used to switch external magnetic fields which stimulate cathode spot motion into preferred directions across the cathode erosion face. The uniformity of the eroded face as well as the continuous discharge time were as a consequence considerably improved. Preliminary film characterization results are also presented. © 1990.