EFFECTS OF ARGON PARTIAL-PRESSURE AND HYDROGEN ADMIXTURES ON THE PROPERTIES OF SPUTTERED CUINSE2 THIN-FILMS

被引:1
作者
SANCHEZQUESADA, F [1 ]
CASE, C [1 ]
GONZALEZDIAZ, G [1 ]
MARTIL, I [1 ]
SANTAMARIA, J [1 ]
IBORRA, E [1 ]
BEAULIEU, R [1 ]
LOFERSKI, JJ [1 ]
机构
[1] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912
关键词
D O I
10.1016/0169-4332(88)90389-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:844 / 853
页数:10
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