A HIGH-PERFORMANCE PLANAR POWER MOSFET

被引:16
作者
COEN, RW [1 ]
TSANG, DW [1 ]
LISIAK, KP [1 ]
机构
[1] HEWLETT PACKARD CO,PALO ALTO,CA 94304
关键词
D O I
10.1109/T-ED.1980.19865
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:340 / 343
页数:4
相关论文
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BERGER J, 1977, SEMICONDUCTOR INTERF
[2]  
GHANDHI SK, 1977, SEMICONDUCTOR POWER, P45
[3]   OPTIMIZATION OF NONPLANAR POWER MOS-TRANSISTORS [J].
LISIAK, KP ;
BERGER, J .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1229-1234
[4]   SEMI-INSULATING POLYCRYSTALLINE-SILICON (SIPOS) PASSIVATION TECHNOLOGY [J].
MATSUSHITA, T ;
AOKI, T ;
OTSU, T ;
YAMOTO, H ;
HAYASHI, H ;
OKAYAMA, M ;
KAWANA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 :35-40