HYDROPNEUMATIC APPARATUS FOR CZOCHRALSKI GROWTH OF CRYSTALS

被引:12
作者
BRICE, JC
LELIEVRE, GW
WHIFFIN, PAC
机构
[1] Mullard Research Laboratories, Redhill, Surrey
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1969年 / 2卷 / 12期
关键词
D O I
10.1088/0022-3735/2/12/312
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An inexpensive hydropneumatically operated crystal puller is described. The basic apparatus provides infinitely variable pulling rates up to over 100 mm h-1. At rates over 2 mm h-1, the short term variations are less than 3% and long term changes are less than 5% per hour. The rotation rate is smoothly variable from zero to about 140 rev min-1 with a drift of less than 5% per hour at any given speed. The apparatus has been used with a variety of growth assemblies to grow crystals of materials with melting points in the range 270-2000°C.
引用
收藏
页码:1063 / +
页数:1
相关论文
共 4 条
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    BRICE, JC
    WHIFFIN, PAC
    [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (05): : 581 - &
  • [3] Czochralski J, 1917, Z PHYS CHEM-STOCH VE, V92, P219
  • [4] A LINEAR RATEMETER FOR CRYSTAL PULLING
    EVANS, BA
    [J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1965, 42 (03): : 153 - &