ADSORPTION OF GASES ON A SILICON SURFACE

被引:31
作者
LAW, JT
FRANCOIS, EE
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D O I
10.1021/j150537a025
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:353 / 358
页数:6
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