LASER STUDIES OF THE REACTIVITY OF SIO WITH THE SURFACE OF A DEPOSITING FILM

被引：18

作者：

BUSS, RJ ^{[1
]}

HO, P ^{[1
]}

WEBER, ME ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1993年 / 13卷 / 01期

关键词：

GAS-SURFACE REACTIONS; IRIS TECHNIQUE; SIO PLASMA FILM DEPOSITION;

D O I：

10.1007/BF01447170

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The reactivity of SiO produced in a SiCl4/02 plasma with the surface of a depositing silicon oxide film has been measured to be near zero for surface temperatures of 25-500-degrees-C using the IRIS technique (imaging of radicals interacting with surfaces). This method combines spatially resolved laser-induced fluorescence with molecular beam techniques. The SiO desorbs from the surface with a spatial distribution consistent with a cosine angular distribution.

引用

页码：61 / 76

页数：16

共 41 条

[1] REACTIVE ATOM SURFACE SCATTERING - THE ADSORPTION AND REACTION OF ATOMIC OXYGEN ON THE SI(100) SURFACE [J].

ENGSTROM, JR ;

NELSON, MM ;

ENGEL, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1837-1840

[2] LOW-LYING ELECTRONIC STATES OF SIO [J].

FIELD, RW ;

LAGERQVIST, A ;

RENHORN, I .

PHYSICA SCRIPTA, 1976, 14 (06) :298-319

[3] EFFECTS OF EXCITED PLASMA SPECIES ON SILICON-OXIDE FILMS FORMED BY MICROWAVE PLASMA CVD [J].

FUKUDA, T ;

OHUE, M ;

MOMMA, N ;

SUZUKI, K ;

SONOBE, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (06) :1035-1040

[4]

Gaspar P. P., 1985, REACTIVE INTERMEDIAT, P333

[5]

GASPAR PP, 1981, REACTIVE INTERMEDIAT, V2, P335

[6]

GASPAR PP, 1971, ORGANIC CHEM SERIES, V1, P504

[7]

GOLE JL, 1985, CHEM PHYS, V100, P135

[8] THERMAL-DECOMPOSITION OF SILANE [J].

GORDON, MS ;

GANO, DR ;

BINKLEY, JS ;

FRISCH, MJ .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1986, 108 (09) :2191-2195

[9] FORMATION AND PROPERTIES OF UNSTABLE INTERMEDIATES CONTAINING MULTIPLE P-PI-P PI-BONDED GROUP-4B METALS [J].

GUSELNIKOV, LE ;

NAMETKIN, NS .

CHEMICAL REVIEWS, 1979, 79 (06) :529-577

[10]

Herzberg G., 1971, SPECTRA STRUCTURES S

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