ELASTIC PLASTIC CHARACTERIZATION OF THIN-FILMS WITH SPHERICAL INDENTATION

被引:26
作者
BELL, TJ
FIELD, JS
SWAIN, MV
机构
[1] CSIRO Division of Applied Physics, Lindfield
关键词
D O I
10.1016/0040-6090(92)90587-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Indentation characterization of thin films has most recently been investigated with currently available ultramicroindentation hardness instruments that use a pyramidal diamond tipped indenter. With these instruments determination of the hardness at depths of penetration as shallow as 5-10 nm is possible. However, the problems associated with such indenters are the inability to characterize the indenter tip radius and the fact that pointed indenters essentially perform tests at constant plastic strain. An alternative approach to measuring the mechanical properties of thin films is to use spherically tipped indenters of known tip radius and to follow the transition from elastic to plastic deformation. The Hertzian analysis provides the basis for determining the elastic behaviour and it may be modified to examine the elastic-plastic transition. From such observations it is possible to determine the variation in the mean indentation pressure with depth of penetration and to construct an equivalent stress strain response of a material. Examples of this approach are given for bulk materials and metallic and polymeric thin films. Data have been collected with a UMIS-2000 instrument and have been analysed and simulated on the basis of the approach outlined above.
引用
收藏
页码:289 / 294
页数:6
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