BURIED RIB PASSIVE WAVE-GUIDE Y-JUNCTIONS WITH SHARP VERTEX ON INP

被引：8

作者：

SHANI, Y

KOREN, U

MILLER, BI

YOUNG, MG

ORON, M

ALFERNESS, R

机构：

[1] AT&T Bell Laboratories, Holmdel, NJ

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1991年 / 3卷 / 03期

关键词：

Integrated Optics - Microscopic Examination - Scanning Electron Microscopy - Waveguides; Optical; -; Losses;

D O I：

10.1109/68.79756

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Crossing waveguides, with a sharp Y junction vertex, were fabricated on InP by using a set of two masks and the stop-etch technique. Sharp Y branches with lower excess loss than the regular blunt Y branches are reported. A comparison with theoretical calculations is also given.

引用

页码：210 / 212

页数：3

共 5 条

[1] LOW-LOSS TI-LINBO3 INTERSECTING WAVE-GUIDES [J].