ION-BOMBARDMENT AND IMPLANTATION AND THEIR APPLICATION TO THIN-FILMS

[1] BALY AR, 1970, FIZIKA S1, V2, P44

[2] BERMAN RM, 1960, J NUCL MATER, V2, P129

[3] Bethe H, 1930, ANN PHYS-BERLIN, V5, P325

[4] BISCHSEL H, 1963, HDB PHYSICS 8C

[5] Bloch F, 1933, ANN PHYS-BERLIN, V16, P285

[6] On the Theory of the Decrease of Velocity of Moving Electrified Particles on passing through Matter [J]. PHILOSOPHICAL MAGAZINE, 1913, 25 (145) : 10 - 31

[7] BORGARDUS EH, 1971, APPL PHYS LETTERS, V18, P77

[8] Carter G., 1968, ION BOMBARDMENT SOLI

[9] EFFECT OF ION BOMBARDMENT ON ADHESION OF ALUMINIUM FILMS ON GLASS [J]. THIN SOLID FILMS, 1969, 4 (01) : 41 - &

[10] EFFECTS PRODUCED BY ION BOMBARDMENT AND IMPLANTATION INTO THIN FILMS AND SURFACES [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 455 - &

[1] BALY AR, 1970, FIZIKA S1, V2, P44

[2] BERMAN RM, 1960, J NUCL MATER, V2, P129

[3] Bethe H, 1930, ANN PHYS-BERLIN, V5, P325

[4] BISCHSEL H, 1963, HDB PHYSICS 8C

[5] Bloch F, 1933, ANN PHYS-BERLIN, V16, P285

[6] On the Theory of the Decrease of Velocity of Moving Electrified Particles on passing through Matter [J]. PHILOSOPHICAL MAGAZINE, 1913, 25 (145) : 10 - 31

[7] BORGARDUS EH, 1971, APPL PHYS LETTERS, V18, P77

[8] Carter G., 1968, ION BOMBARDMENT SOLI

[9] EFFECT OF ION BOMBARDMENT ON ADHESION OF ALUMINIUM FILMS ON GLASS [J]. THIN SOLID FILMS, 1969, 4 (01) : 41 - &

[10] EFFECTS PRODUCED BY ION BOMBARDMENT AND IMPLANTATION INTO THIN FILMS AND SURFACES [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 455 - &