CR PROFILES IN SEMI-INSULATING GAAS AFTER ANNEALING WITH AND WITHOUT SIO2 ENCAPSULANTS IN A H2-AS4 ATMOSPHERE

被引:31
作者
EU, V [1 ]
FENG, M [1 ]
HENDERSON, WB [1 ]
KIM, HB [1 ]
WHELAN, JM [1 ]
机构
[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007
关键词
D O I
10.1063/1.91735
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:473 / 475
页数:3
相关论文
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